(SCI)
Selective Deposition of Multiple Sensing Materials on Si Nanobelt Devices through Plasma-Enhanced Chemical Vapor Deposition and Device-Localized Joule Heating
Applied Materials & Interfaces, （20, Submitted）, 2017, 9, 46, （IF: 9.229）
Ru Zheng Lin, Kuang Yang Cheng, Fu-Ming Pan, Jeng-Tzong Sheu*
2017-09-30
9
46
English
